Advanced transfer printing with in-situ optical monitoring for the integration of micron-scale devices
نویسندگان
چکیده
Transfer printing integration of planar membrane devices on photonic and electronic circuits is becoming a well established technology. Typical systems incorporate single layer printed into full contact with the host substrate. In this work we present an advanced transfer print system that enables optical in non-planar geometries allows in-situ monitoring devices. We show micro-resonators air-clad whispering gallery modes coupled to on-chip waveguides, inverted device three dimensionally assembled micro-cavities incorporating semiconductor micro-lenses nanowire lasers. demonstrate onto non-standard substrates including chip facets single-mode fibre ends. The was carried out alignment assistance from coupling through real-time allowing active system.
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ژورنال
عنوان ژورنال: IEEE Journal of Selected Topics in Quantum Electronics
سال: 2022
ISSN: ['1558-4542', '1077-260X']
DOI: https://doi.org/10.1109/jstqe.2022.3227340